1. Grease: In the process of polysilicon production, oil molecules are very harmful to polysilicon. It has been proved that a few ppm of oil content in the entire process system may cause the polysilicon reaction rate to slow down, the yield to decrease, and even the silicon reaction to stop. Therefore, the degreasing process of polysilicon equipment is particularly important.
2. Moisture: The water contains a large amount of chloride ions, which are very sensitive to the reaction of polycrystalline silicon. Equipment and system drying processes are critical.
3. Chloride ion residue: Chloride ions remaining on the surface of water and other solutions have a great influence on polysilicon. Therefore, it is very important to carry out a pure water rinsing process on the equipment after cleaning.
4, oxides, dust and other impurities: the presence of other dirt, the impact on the production of polysilicon is also very large. Therefore, it is necessary to use the pickling process to clean other dirt during the equipment cleaning process.
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